2014 Fiscal Year Final Research Report
MEMS tactile sensors based on the characteristics of the human tactile receptors
| Project/Area Number |
24656162
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Keywords | 触覚センサ / カンチレバー / マイクロデバイス / MEMS |
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| Outline of Final Research Achievements |
In this study, based on the characteristics of the human tactile receptors, the research and development of MEMS tactile sensors with wide dynamic range were carried out. The tactile sensor encapsulated with piezoresistive cantilevers in silicone oil showed a differential response against applied forces, and was able to detect small component of the forces with high sensitivity. The tactile sensor with a pyramidal or bump structure showed the characteristic of high sensitivity for small forces together with low sensitivity for large forces. These tactile characteristics are similar to those of the human, and effective to expand the dynamic range of force detection.
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| Free Research Field |
マイクロシステム
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