2012 Fiscal Year Final Research Report
Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam
| Project/Area Number |
24656436
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Material processing/treatments
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TERASHIMA Kazuo 東京大学, 大学院・新領域創成科学研究科, 教授 (30176911)
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| Project Period (FY) |
2012
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| Keywords | プラズマ処理 / レーザー加工 / イオンビーム / 超臨界イオンビーム / 超臨界流体プラズマ / 材料表面加工 |
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| Research Abstract |
In this study, fabrication of supercritical fluid ion (ion beam), spectroscopic diagnostics of supercritical fluid plasma as ion source, and its application to materials surface treatment/fabrication process were performed. Then, totally, the nature of high-performance process nature, such as its low-temperature process and environmental friendly process, were confirmed. As a result, the possibility of innovative high-performance materials surface treatment/fabrication process was demonstrated.
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