2014 Fiscal Year Final Research Report
Making micro-/nano-device structures by self-assembly using environmental-friendly in-solution process
Project/Area Number |
24681020
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Research Category |
Grant-in-Aid for Young Scientists (A)
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Allocation Type | Partial Multi-year Fund |
Research Field |
Nanostructural science
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Research Institution | Toyota Technological Institute |
Principal Investigator |
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Project Period (FY) |
2012-04-01 – 2015-03-31
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Keywords | ナノ・バイオ材料 / MEMS/NEMS |
Outline of Final Research Achievements |
We developed novel micro-/nano-fabrication processes that used nanobio-materials as building blocks for constructing device structures. The nanobio-materials were patterned on a substrate using electrostatic interaction in solution. On the substrate, positively/negatively charged groups were displayed using surface modification. Controlling the charge screening length, the nanobio-materials were selectively adsorbed on the charged patterns which had attractive interaction. Using the selectively patterned nanobio-materials, the performances of MEMS devices were improved.
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Free Research Field |
ナノバイオテクノロジー
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