Sensitive polar gas sensor using active surface of piezoelectric crystals and ultra-long propagation of surface acoustic wave

2014 Fiscal Year Final Research Report

• Project/Area Number: 24686013
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Partial Multi-year Fund
• Research Field: Applied physics, general
• Research Institution: Tohoku University
• Principal Investigator: TSUJI Toshihiro 東北大学, 工学(系)研究科(研究院), 助教 (70374965)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 圧電結晶 / 弾性表面波 / ボールSAWセンサ / 加工変質層 / 非晶質シリカ / 紫外線照射 / 微量水分 / 温度補償

Outline of Final Research Achievements

Active surface of piezoelectric crystals is useful for the detection of polar gas molecules when it is used as a sensitive film of a surface acoustic wave (SAW) sensor because of its low attenuation nature. In this work, the target polar gas is the trace moisture that is industrially important and the concentration is less than 1 ppm. During investigation, it was found that one of origins of quartz active surface was a damaged layer of amorphous silica and was imitated by the silica film synthesized by sol-gel reaction. In the case of application to the ball SAW sensor where significant long propagation of SAW is available, it was shown that the sensor could be used for the trace moisture sensor with high sensitivity and significant fast response.

Free Research Field

超音波工学、材料評価