Topology optimization for electrostatic Micro Electro Mechanical Systems (MEMS) which are driven by very low-voltage

2014 Fiscal Year Final Research Report

• Project/Area Number: 24760065
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Engineering fundamentals
• Research Institution: Osaka University
• Principal Investigator: YAMASAKI SHINTARO 大阪大学, 工学(系)研究科(研究院), 准教授 (70581601)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 構造最適化 / トポロジー最適化 / 静電駆動MEMS / 低消費電力

Outline of Final Research Achievements

The objective of this research is to realize creative design for electrostatic Micro Electro Mechanical Systems (MEMS) structures which are driven by very low-voltage. To achieve this objective, I developed a structural optimization method for electrostatic MEMS. In the proposed method, electrostatic force is evaluated on the basis of electrostatic analysis, and large displacement caused by the electrostatic force is also evaluated by the coupled analysis. In this manner, physical phenomena on electrostatic MEMS are accurately evaluated, and structural optimization is appropriately performed.

Free Research Field

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