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2014 Fiscal Year Final Research Report

Piezoelectric thin film MEMS with giant shear electromechanical coupling

Research Project

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Project/Area Number 24760075
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Materials/Mechanics of materials
Research InstitutionNagoya Institute of Technology

Principal Investigator

YANAGITANI Takahiko  名古屋工業大学, 工学(系)研究科(研究院), 助教 (10450652)

Project Period (FY) 2012-04-01 – 2015-03-31
Keywords圧電薄膜
Outline of Final Research Achievements

Shear piezoelectric films are attractive for sensors detecting viscosity and conductivity in liquid. High k15 is required for these sensors. We investigated the k15 of the c-axis tilted Sc doped AlN films. k15 of the films showed 16.8 % which is 3.2 times larger than that of AlN single crystal.

Free Research Field

圧電薄膜

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Published: 2016-06-03  

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