2014 Fiscal Year Final Research Report
Piezoelectric thin film MEMS with giant shear electromechanical coupling
| Project/Area Number |
24760075
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Nagoya Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Keywords | 圧電薄膜 |
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| Outline of Final Research Achievements |
Shear piezoelectric films are attractive for sensors detecting viscosity and conductivity in liquid. High k15 is required for these sensors. We investigated the k15 of the c-axis tilted Sc doped AlN films. k15 of the films showed 16.8 % which is 3.2 times larger than that of AlN single crystal.
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| Free Research Field |
圧電薄膜
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