2013 Fiscal Year Final Research Report
Study of dimensional measurement of micro-hole by using a high-sensitivity probing system with a nanopipette ball probe
| Project/Area Number |
24760097
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
ITO So 東北大学, 工学(系)研究科(研究院), 助教 (00624818)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Keywords | 計測工学 / ナノメトロロジー / 寸法計測 / シェアフォース / プロービング / スタイラス / ナノピペット / 微小球 |
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| Research Abstract |
A new type probing system has been developed for the dimansional measurement of micro-holes. The stylus used in this study is consisted of a glass nanopipette and micro glass sphere. By attaching the micro-sphere at the edge of the glass nanopipette, the stylus tip with the diameter of less than 10 micrometer can maintain the uniform shape from all directions.The contact detection between the stylus tip and the measuring surface can be realized by utilizing the method of shear-force detection which employ the interaction force owing to the meniscus layer. It has been verified that the developed probing system has the ability to measure the dimensional measurement with nanometric resolution and sub-micrometric measurement accuracy by using the nanopipette ball stylus.
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