The removal tests for organic chemical film by micro ice jets

2014 Fiscal Year Final Research Report

• Project/Area Number: 24760153
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Fluid engineering
• Research Institution: Fukuoka Industrial Technology Center
• Principal Investigator: SHUZENJI Kiyotaka 福岡県工業技術センター, 機械電子研究所, 研究員 (00416504)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 超音速 / ノズル / 氷核生成 / 洗浄 / 剥離 / レジスト

Outline of Final Research Achievements

As a clean technique, micro ice jets generated from air and water used by the Laval nozzle were utilized in the semiconductor manufacturing process. The removal tests for the organic chemical film were conducted in order to investigate the peeling performance of micro ice jets operated at the air total pressure of 1.4MPa in combination with the measurement of the particle velocity by a phase Doppler particle analyzer. As the results, the depth of the shape peeled by micro ice jets was the longest at the nozzle length L of 250mm, although the particle velocity at the center of the nozzle exit was the largest at L=200mm. These results indicate that the removal performance of micro ice jets was strongly affected by the both the particle velocity and the production amount of ice.

Free Research Field

熱流体