2013 Fiscal Year Final Research Report
Development of PTFE-waveguide circuit for short millimeter-wave frequencies based on SR direct etching process
| Project/Area Number |
24760282
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Okayama Prefectural University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
UTSUMI Yuichi 兵庫県立大学, 高度産業科学技術研究所, 教授 (80326298)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Keywords | ミリ波 / 導波管 / 放射光 / 放射光エッチング / マイクロデバイス / スパッタ蒸着 / 導波管フィルタ |
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| Research Abstract |
In this study, the PTFE microstructures were fabricated by direct exposure to synchrotron radiation, and the waveguide components for short millimeter-wave frequencies (G-band, 140-220 ) were obtained by sputter deposition of metal on the PTFE surface, for the purpose of establishing the fabrication technology which could apply directly to submillimeter-wave region (300GHz>).
Then, the frequency tripler and the detector were used to equip a G-band measurement system, and the transmission losses were evaluated. It was confirmed that the fabricated structures worked as waveguide. Next, the trial fabrication of the filter circuits was performed at a center frequency 180 GHz. The passband characteristics of the filter were confirmed by the measurement. The present fabrication process for the short millimeter-wave frequencies was validated.
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