Development of high performance large size x-ray video camera using CdTe layers grown on Si substrates

2015 Fiscal Year Final Research Report

• Project/Area Number: 25242048
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Medical systems
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: Yasuda Kazuhito 名古屋工業大学, 工学(系)研究科(研究院), 教授 (60182333)
• Co-Investigator(Kenkyū-buntansha): NIRAULA Madan 名古屋工業大学, 大学院工学研究科, 准教授 (20345945)
• Co-Investigator(Renkei-kenkyūsha): SUZUKI Kazuhiko 北海道科学大学, 工学部, 教授 (30226500)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 放射線検出器 / CdTe / エピタキシャル成長 / 電子デバイス

Outline of Final Research Achievements

Development of high performance x-ray video camera, which consists of 2-dimensional avalanche photodiode (APD) arrays, has been studied. The APDs with structure of p+-CdTe/p-CdTe/n-CdTe/n+-Si were fabricated using single crystal CdTe layers grown on Si substrates by metalorganic vapor phase epitaxy. To realize high performance APD arrays, those have low dark current and uniform distribution of multiplication, optimizations of growth procedures of CdTe layers, and improvement of fabrication process have been carried out.

Free Research Field

半導体工学