Femto watt thermal sensor

2015 Fiscal Year Final Research Report

• Project/Area Number: 25246031
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: General applied physics
• Research Institution: Tohoku University
• Principal Investigator: Ono Takahito 東北大学, 工学(系)研究科(研究院), 教授 (90282095)
• Co-Investigator(Kenkyū-buntansha): Toda Masaya 東北大学, 大学院工学研究科, 准教授 (40509890) ; Kawai Yusuke 東北大学, 大学院工学研究科, 助教 (20451536)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 熱量センサ / 振動子 / 細胞 / マイクロチャンネル

Outline of Final Research Achievements

Thermal sensors for the detection　of　tiny　heat　from　a　single　biological　cell　in　a　solution　have　been　developed using a microfabrication technique. This sensor utilizes the temperature dependence of the mechanical resonance, and heat transmits to the sensor by thermal conduction via a heat guide. The resonant sensor is thermally isolated from surronding area using vacuum isolation, thus the thermal loss is minimized. Scaling down of the sensor decreases the thermal capasitance of the sensor, which enhance the temperature response. Heat detection from a single cell is demonstrated using the developed thermal sensor.

Free Research Field

マイクロナノ工学