Multiphysics simulation of electron beam nanoprocess

2015 Fiscal Year Final Research Report

• Project/Area Number: 25249052
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Osaka Prefecture University
• Principal Investigator: YASUDA Masaaki 大阪府立大学, 工学(系)研究科(研究院), 准教授 (30264807)
• Co-Investigator(Kenkyū-buntansha): KOTERA MASATOSHI 大阪工業大学, 工学部, 教授 (40170279) ; TADA KAZUHIRO 富山高等専門学校, 電気制御システム工学科, 准教授 (90579731)
• Project Period (FY): 2013-05-31 – 2016-03-31
• Keywords: 電子ビーム / ナノプロセス / マルチフィジックス / 分子動力学 / モンテカルロ法 / 計算物理

Outline of Final Research Achievements

Multiphysics simulations are performed to study various physical phenomena in electron beam nanoprocesses. The simulations consist of a Monte Carlo simulation of electron scattering and molecular dynamics simulation. Some issues encountered in electron beam nanoprocesses such as electron irradiation defects, resist heating effects and charging effects are simultaneously analyzed using the simulations. The simulations revealed the correlations among those physical phenomena under electron irradiation and the effects of those phenomena on the electron beam fabrications and modifications.

Free Research Field

電子ビーム応用