Dynamic micro-plasma excited AlGaN high power DUV light emitter operated at around 10W class power

2015 Fiscal Year Final Research Report

• Project/Area Number: 25249053
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Ritsumeikan University
• Principal Investigator: Aoyagi Yoshinobu 立命館大学, 総合科学技術研究機構, 上席研究員 (70087469)
• Co-Investigator(Kenkyū-buntansha): KUROSE Noriko 立命館大学, 総合科学技術研究機構, 研究員 (50520540) ; KAMIYA Itaru 豊田工業大学, 工学(系)研究科, 教授 (10374018) ; KAMIKO Noyuki 立命館大学, 理工学部, 教授 (70251345) ; ARAKI Tsutomu 立命館大学, 理工学部, 教授 (20312126)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 深紫外発光素子 / MIPE / 大面積発光素子 / 高出力発光素子 / Si基板 / LED / マイクロプラズマ / AlGaN

Outline of Final Research Achievements

Purpose of this research is to realize a micro-plasma-excited deep ultraviolet light emitting device (MIPE) with large scale and high power operated at short DUV wavelengths. We have developed a new type MIPE with ignition-ready to realize stable operation of the MIPE emission. We have succeeded in developing the MIPE with MgO emitter operated at the wavelength region of 190～250nm. Using these technologies we have developed 20x10cm large size standing free MIPE which is the largest size DUV light emitter around the world. The power was about 1W at 242nm using MgO emitter. By arranging 8 panels we can realize 10W class MIPE which can be used for application toward laminar flow type water purification system and large size curing system

Free Research Field

半導体工学