2015 Fiscal Year Final Research Report
Development of a nano mechanical sensor for gas molecule detection at low density by hybrid structure fabrication technique
| Project/Area Number |
25289011
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
YAMADA Ichiro 東京大学, 新領域創成科学研究科, 特任研究員 (70345081)
KOMETANI Reo 東京大学, 新領域創成科学研究科, 特任研究員 (90466780)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | メカニカル振動子 / ハイブリッド構造 / ガスセンシング / ガス弁別機能 / 酸化スズ / グラフェン / ブロック共重合体ナノ構造 / ノイズ信号処理 |
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| Outline of Final Research Achievements |
The research aimed for the realization of ultra-high sensitive nano mechanical sensor able to detect gas molecules at ppm-ppb level in the atmosphere. A coupled nano mechanical resonator with frequency tuning capability by electrostatic force was designed and prototyped and showed the capability of 9.7 ag mass sensing detection. A doubly clamped nano mechanical resonator hybridized with tin oxide thin film and Pt film a catalyst was designed and prototyped and showed the detection sensitivity of 10 ppm as actual measurement and sub ppm order as estimated. A gas sensing device by a commercially available CVD single layer grapheme was designed and prototyped and showed the capability of discrimination of nitrogen and acetone gases by similarity analysis and frequency analysis of noise signal of the resistance change.
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| Free Research Field |
ナノメカニカル構造作製技術，センシング技術，信号処理技術
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