Evaluation of micro structure by fusion of three dimensional shape measurement and ultimate analysis using SEM

2016 Fiscal Year Final Research Report

• Project/Area Number: 25289066
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Kansai University
• Principal Investigator: Arai Yasuhiko 関西大学, システム理工学部, 教授 (80131415)
• Co-Investigator(Kenkyū-buntansha): 青柳 誠司 関西大学, システム理工学部, 教授 (30202493) ; 多川 則男 関西大学, システム理工学部, 教授 (50298840)
• Project Period (FY): 2013-04-01 – 2017-03-31
• Keywords: ナノマイクロメカトロニクス / 三次元形状計測 / 元素分析

Outline of Final Research Achievements

The 3-D measurement method by SEM has already been proposed by using the principle of projection moire. In this method, by the mechanism of producing some shadows of grid on the surface of the object by back scattering electron beam, a micro-size object can be measured in high resolution. However, in the case of measurement of industrial elements, not only 3-D shape measurement, but also the physical properties of material is sometimes required to check strongly for practical uses.
In this paper, the realization of such inspection technology by combining the ultimate analysis and 3-D measurement method by SEM is discussed. The new measurement technology by fusion of 3-D shape measurement and ultimate analysis is proposed. In experimental results, the 3-D shape measurement of the micro object made of alloy material is measured. From measured results, the validity of the new method is discussed.

Free Research Field

光応用計測