Development of deposition method of wear resisitant BCN films

2015 Fiscal Year Final Research Report

• Project/Area Number: 25289259
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Ohtake Naoto 東京工業大学, 理工学研究科, 教授 (40213756)
• Research Collaborator: AKASAKA Hiroki ; HIEDA Junko ; KAMIS Shahira Binti ; MUNOZ GUIJOSA Juan ; KONDOU Shota ; HANAWA Takao ; TSUTSUMI Yusuke
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 材料加工・処理 / 薄膜プロセス / アダマント薄膜 / コーティング / 炭窒化ホウ素

Outline of Final Research Achievements

BCN films were deposited by using a Filtered Cathodic Vacuum Arc (FCVA) apparatus developed, and its chemical compositions, structure and mechanical properties were evaluated. BCN films were deposited using carbon and boron mixture target filled with boron powder in a circular groove in nitrogen atmosphere. Nitrogen contents of BCN films increased from 0 at.% to 12 at.%, and boron contents of BCN films decreased from 0.8 at.% to 0.05 at.% with increasing the flow rate of N2. Hardness of BCN films decreased with increasing the content of nitrogen, and was as high as 67.1 GPa at N2 flow rate was zero. Friction coefficient of the BCN films is u=0.5 to 0.6. Finally, heat-resisting property of the BCN films were evaluated. The BCN films (N<4 at.%) were totally disappeared at 550 ℃; however, BCN films (N>7 at.%) were remained at 550 ℃. These results led us to the conclusion that BCN film with N content of 2-7 at.% has high-hardness, high wear resistance and high heat resistance.

Free Research Field

材料工学