Development of in-situ three-dimensional shape measurement method by tilt-ellipsometry

2015 Fiscal Year Final Research Report

• Project/Area Number: 25390089
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Optical engineering, Photon science
• Research Institution: Yamagata University
• Principal Investigator: Tsuru Toshihide 山形大学, 教育文化学部, 准教授 (30306526)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 偏光 / エリプソメトリー / 形状計測

Outline of Final Research Achievements

For fast and precise three-dimensional shape measurement by tilt-ellipsometry, pseudo-dome type illumination using LEDs of more than 97% of degree of circular polarization was developed. We proposed calibration method by using fast four detectors polarimeter for adjustment of azimuthal angle of the liquid crystal variable retarder. Using circularly polarized light illumination, the same slope and azimuthal angles of the facet is obtained from the different polarization images measured at two wavelengths. High-sensitivity characteristic to the slope and azimuth of the tilt-ellipsometry could be successfully demonstrated.

Free Research Field

応用光学