Studies of plasma surface treatment by current heating platinum catalytic probe for oxygen radical density measurement

2015 Fiscal Year Final Research Report

• Project/Area Number: 25390111
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Plasma electronics
• Research Institution: Tokyo City University
• Principal Investigator: Ono Shigeru 東京都市大学, 工学部, 名誉教授 (80097170)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 酸素原子ラジカル / 触媒プローブ / 表面処理 / 白金

Outline of Final Research Achievements

This work had been conducted paying attention to the oxygen atom radical that play important role in the plasma surface modification. Hydrophilic treatment of Polyimide surface was taken up as an example of surface modification. The oxygen atom radical densities of various plasma apparatus were measured by a platinum catalytic probe, and the relationship between the hydrophilic treatment and the oxygen atom radical density was discussed. The measurement method of the platinum catalytic probe was also discussed.
In the course of research carried out, the effect of the plasma was found to be important in the ozone dissociation on the metal surface.

Free Research Field

プラズマ科学