2015 Fiscal Year Final Research Report
High pressure and flat panel plasma sources for ultraviolet light-emitting from a large area to a small area
| Project/Area Number |
25400533
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Shizuoka University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
NAKAMOTO Masayuki 静岡大学, 工学部, 教授 (10377723)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | 基礎・放電プラズマ / MEMS / 高気圧プラズマ / 微小突起アレイ陰極 / 紫外光 |
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| Outline of Final Research Achievements |
Stable, low breakdown voltage discharges and nano-structured cathode arrays have been developed by using Transfer Mold emitter fabrication method and amorphous carbon thin film having a high hardness and a high chemical stability to realize highly efficient and reliable ultraviolet light-emitting plasma sources. Nano-structured Transfer Mold cathode array plasma sources having emitter sizes of as small as 41 nm, exhibited the extremely low breakdown voltages and the small discharge current fluctuations of as low as 160 V and 1.8%, being compared with 0.5-2.1kV and 2-6% of conventional dielectric barrier discharges.
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| Free Research Field |
プラズマ科学
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