Development of three-dimensional nano-processing technique using the swelling phenomenon of crystal materials with highly-charged ion beams

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420061
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kochi University of Technology
• Principal Investigator: Momota Sadao 高知工科大学, 環境理工学群, 准教授 (50299393)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 微細加工技術 / 半導体結晶材料 / ナノ材料科学 / 粒子ビーム科学

Outline of Final Research Achievements

The feasibility of ion-beam-induced swelling phenomenon on crystal materials as a new method to fabricate 3-dimensional structure in the nano-micro meter order has been investigated.
A swelling height of Si and SiC crystal was observed as a function of processing parameters, energy and fluence of irradiated Ar and Kr ion, and a fabrication of swelling structures has been achieved up to the height of 100 nm within a precision of 4 nm. The deformation of structures on Si crystal along a lateral direction has been successfully demonstrated. Relatively lower fluence of irradiated ion beam has prevented fabricated structure from serious deterioration of its mechanical properties, compared with conventional ion-beam technologies. This result indicates that swelling structures would be suitable for mechanical use.

Free Research Field

重イオンビームの照射効果や加工・改質技術に関する研究