Establishment of nano metal pattern transfer technique using roll nanoimprint method

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420067
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Tokyo University of Science
• Principal Investigator: Taniguchi Jun 東京理科大学, 基礎工学部, 教授 (40318225)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: ナノインプリント / 銀インク / 光硬化性樹脂 / ロール技術 / 金型 / レプリカモールド / 離型性 / 積層構造

Outline of Final Research Achievements

Establishment of fabrication technology for metal nano pattern on plastic film via roll to roll (RTR) nanoimprint lithography (NIL). Using techniques are replica mold on roll base and removal of excess silver ink. The base pattern transfer process was UV nanoimprint lithography and silver nano patterns were obtained on UV curable resin surface. As a result, high speed pattern transfer of silver line pattern, which had less than 100 nm feature size, is possible by RTR UV-NIL. Furthermore, roll press method can fabricate stacking metal nano pattern layers. We have fabricated ten layers silver pattern by roll press method and stacking metal nano pattern film had red color. This color is coincide with plasmonic resonance wavelength.

Free Research Field

ナノテクノロジーを用いたものづくり