2015 Fiscal Year Final Research Report
Development of ultra-precise fabrication processing of single nanometer scale using SPM with single-wall nano tube
| Project/Area Number |
25420073
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
高木 誠 愛知工業大学, 工学部, 教授 (40288428)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | 単層ナノチューブ / SPM加工 / シングルナノメータスケール加工 / 穴加工 |
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| Outline of Final Research Achievements |
In order to develop ultra-precision systems, it is surely required that a new ultimate processing technology needs fabrication size below 10 nm, i.e. single nanometer scale. This study paid great attention to realize the ultimate processing on engineering of single nanometer scale structures using a single-wall carbon nanotube (SWNT) probe. The much difficulty in fabrication of SWNT probes with high probability could be overcome using by unique phenomena with mixed dispersion liquid with both MWNT and SWNT through the pull-up method that we developed originally. In this process, it was clarified that SWNT with high probability attached to the point of MWNT, which was adhered to the apex of the conventional tungsten (W) needle. The success rate for fabrication of the SWNT probe was increased up to about 17 %. Finally, single nanometer scale pit with diameter of 9 nm and depth of 4 nm was obtained.
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| Free Research Field |
ナノテクノロジー
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