Large-scale profile evaluation by using a precision angle detector

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420077
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: High Energy Accelerator Research Organization
• Principal Investigator: Kume Tatsuya 大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 講師 (40353362)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 形状評価 / 角度検出 / ジャイロ / レートオフセット / 反転測定 / 地球自転

Outline of Final Research Achievements

Profile shape evaluation by detecting tangential angles of the profile has been adopted for precise evaluation, because it is not affected by accuracy of the shape reference. It is considered to be also competent for evaluating large objects, because it inherently requires no shape references, which become difficult to be defined enough accurately as the object becomes large.
Here, a gyro is used for detecting the angles. It can evaluate profiles in a horizontal plane, which cannot be evaluated by an inclinometer. Moreover, there is no limitation in its measurement distance, while that of an autocollimator is limited by its measurement beam range.
Fluctuation of angular signal of the gyro is eliminated by obtaining second difference of the angular signal from the rotating gyro based on reversal measurement. The angle of the gyro rotating axis against the axis of the earth rotation can be derived by using two gyros rotating inversely with each other without affected by the fluctuations.

Free Research Field

精密形状測定