2015 Fiscal Year Final Research Report
maicro-flexible actuator driven by applying electric current to a conductive polymer layer
Project/Area Number |
25420225
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Intelligent mechanics/Mechanical systems
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Research Institution | Nihon University |
Principal Investigator |
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Project Period (FY) |
2013-04-01 – 2016-03-31
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Keywords | 導電性高分子 / PEDOT/PSS / アクチュエータ / 熱変形 / 通電加熱 / MEMS |
Outline of Final Research Achievements |
Performance of a MEMS actuator using a thermal expansion drive of a conductive polymer (CP) have been investigated. The actuator consists of a thin polymer diaphragm (polyimide, φ5 mm, t10 μm) and a CP (PEDOT/PSS) layer coated on the diaphragm surface. The diaphragm was deflected by applying electricity to the CP layer. When the CP layer was t10-30 μm (30-200 Ω), diaphragm displacement of several tens μm was generated. A method of enhancing the electrical conductivity of PEDOT:PSS by combining solvent treatment (5 wt% ethylene glycol) and adding a small amount of silver nanoparticles in a solution was investigated to enhance electrical conductivity. The electric conductivity applied with this method was 200-260 Ω-1・cm-1 for thicknesses of 1-2 μm (conductive area: 12×10 mm) and the generated temperature increase was 20-50℃ at applied voltages of 3-5 V. It was confirmed that the added Ag nanoparticles contributed to making the conductive areas more uniformly.
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Free Research Field |
工学
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