2015 Fiscal Year Final Research Report
study on high efficiency solar cell driven by metal workfunction
| Project/Area Number |
25420282
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
MIZUNO Tomohisa 神奈川大学, 理学部, 教授 (60386810)
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| Co-Investigator(Renkei-kenkyūsha) |
HASUMI Masahiko 東京農工大学, 大学院工学研究院, 助教 (60261153)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | ソーラーセル / パッシベーション膜 / 低温プロセス技術 / キャリヤライフタイム / マイクロ波吸収 / 加熱水 / 水蒸気熱処理 / 光誘起フリーキャリヤ |
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| Outline of Final Research Achievements |
We developed two kinds of surface passivation technologies for crystalline silicon: ① a combination of oxygen radical treatment at room temperature with 260℃、1.3MPa H2O vapor heat treatment for 3 h and ② heat treatment in liquid water at 110℃ for 1h. Those treatment form 1 nm thick oxide layers at the silicon surfaces and reduce the density of surface recombination defects resulting in increasing the effective minority carrier lifetime. Especially the heat treatment in liquid water at 110℃ for 1h achieved the effective minority carrier lifetime as high as that of thermally grown oxide layer coating the silicon surfaces. MIS diodes were fabricated with those passivation technologies and Au and Al metals. Good diode characteristics were observed. Solar cell characteristics with efficiencies of 8-9% were also obtained.
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| Free Research Field |
半導体物性 半導体デバイス 半導体プロセス工学 計測工学
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