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2015 Fiscal Year Annual Research Report

化学リフトオフ技術を用いたGaN系集積化面発光素子製作検討

Research Project

Project/Area Number 25420341
Research InstitutionKogakuin University

Principal Investigator

本田 徹  工学院大学, 公私立大学の部局等, 教授 (20251671)

Co-Investigator(Kenkyū-buntansha) 山口 智広  工学院大学, 公私立大学の部局等, 准教授 (50454517)
Project Period (FY) 2013-04-01 – 2016-03-31
KeywordsGaN / 発光ダイオード / MBE / 結晶成長 / リフトオフ / 透明電極 / 酸化物 / X線回折
Outline of Annual Research Achievements

サファイア基板上にAl単結晶を成長した後にGaN薄膜及び発光ダイオード製作のため、2点を中心に検討を行った。第1点は、Alを表面窒化し、GaN成長後、GaNにクラックが生じ、下部Alが表面に這い上がる現象が確認され、その改善を行うために、低温GaN堆積層を挿入することである。また、MIS型発光ダイオードにおける発光強度の均一性に問題があることがわかったので、絶縁層の均一性向上のため、酸化アルミニウムからAlNに材料変更を行う点である。近紫外透明電極については、GaInOx酸化物が将来性が高いとの判断から、引き続き検討を行った。
アルミニウム槽の表面を窒化処理し、AlNを形成後、GaN低温堆積層導入により、クラックが減少し、素子応用について可能性を示すことができた。一方、GaN系集積化MIS型発光ダイオードをフォトリソグラフィーを用いて形成したところ、これまでに実現できなかった室温における発光が安定して観測されるようになったが、不均一な発光パターンが観測された。これは、絶縁層であるアルミニウム酸化物の膜厚に問題があると考えている。そこで、アルミニウム酸化物をAlN単結晶でヘテロエピタキシャル成長を行い、原子レベルでの膜厚の均一化を試みることにした。AlN/GaNヘテロ構造製作をMBE法により検討を行った。
+c面で結晶成長を行うことにより原子層レベルで均一なAlN薄膜形成は実現できたが、素子化を行った場合、逆方向リーク電流が非常に増加する結果を得た。酸化物の場合には、「Alフェースパック法」により低減できたので、窒化物にも同種の技術導入が必要と考える。

  • Research Products

    (56 results)

All 2016 2015

All Journal Article (4 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 4 results,  Acknowledgement Compliant: 3 results) Presentation (52 results) (of which Int'l Joint Research: 37 results,  Invited: 9 results)

  • [Journal Article] Temperature-dependent exciton resonance energies and their correlation with IR-active optical phonon modes in β-Ga2O3 single crystals2016

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, and M. Higashiwaki
    • Journal Title

      Applied Physics Letters

      Volume: 108 Pages: 101904

    • DOI

      10.1063/1.4943175

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Lattice dynamics of a mist-chemical vapor deposition-grown corundum-like Ga2O3 single crystal2015

    • Author(s)
      R. Cusco, N. Domenech-Amador, T. Hatakeyama, T. Yamaguchi, T. Honda and L. Artus
    • Journal Title

      Journal of Applied Physics

      Volume: 117 Pages: 185706

    • DOI

      10.1063/1.4921060

    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Improvement of strained InGaN solar cell performance with a heavily doped n+-GaN substrate2015

    • Author(s)
      M. Sumiya, T. Honda, L. Sang, Y. Nakanon, K. Watanabe and F. Hasegawa
    • Journal Title

      Physics Status Solidi (A)

      Volume: 212 Pages: 1033-1038

    • DOI

      10.1002/pssa.201431732

    • Peer Reviewed
  • [Journal Article] Valence band ordering in β-Ga2O3 studied by polarized transmittance and reflectance spectroscopy2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Pages: 112601

    • DOI

      10.7567/JJAP.54.112601

    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 分子プレカーサー法で製作した銀分散ZnO薄膜の光学的特性2016

    • Author(s)
      高 大地, 尾沼 猛儀, 澁川 貴史, 永井 裕己, 山口 智広, Ja-Soon Jang, 佐藤 光史, 本田 徹
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学, 東京
    • Year and Date
      2016-03-19 – 2016-03-24
  • [Presentation] β-Ga2O3結晶における励起子-LOフォノン相互作用2016

    • Author(s)
      尾沼 猛儀, 齋藤 伸吾, 佐々木 公平, 後藤 健, 増井 建和, 山口 智広, 本田 徹, 倉又 朗人, 東脇 正高
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学, 東京
    • Year and Date
      2016-03-19 – 2016-03-24
  • [Presentation] (0001)α-Al2O3基板上および(0001)GaNテンプレート上へのIn2O3膜のミストCVD成長2016

    • Author(s)
      小林 拓也, 田沼 圭亮, 山口 智広, 尾沼 猛儀, 本田 徹
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学, 東京
    • Year and Date
      2016-03-19 – 2016-03-22
  • [Presentation] 分子プレカーサー法を用いたIn-Ga-Mg-O薄膜製作検討2016

    • Author(s)
      高橋 勇貴, 後藤 良介, 安野 泰平, 尾沼 猛儀, 永井 裕己, 山口 智広, 佐藤 光史, 本田 徹
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学, 東京
    • Year and Date
      2016-03-19 – 2016-03-22
  • [Presentation] Technical issues of GaInN growth with high indium composition for LEDs2016

    • Author(s)
      T. Honda, T. Yamaguchi, and T. Onuma
    • Organizer
      The Collaborative Conference on Crystal Growth 2015 (3CG 2015)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2016-02-14 – 2016-02-17
    • Int'l Joint Research / Invited
  • [Presentation] Valence band structure of monoclinic gallium oxide studied by polarized optical measurements2016

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      The Collaborative Conference on Crystal Growth 2015 (3CG 2015)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2016-02-14 – 2016-02-17
    • Int'l Joint Research / Invited
  • [Presentation] Epitaxial growth of GaInN by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy2015

    • Author(s)
      T. Yamaguchi, T. Honda, T. Onuma, T. Sasaki, M. Takahasi, T. Araki and Y. Nanishi
    • Organizer
      第25回日本MRS年次大会
    • Place of Presentation
      横浜
    • Year and Date
      2015-12-08 – 2015-12-10
    • Invited
  • [Presentation] Study of nitridation conditions of Al layer for GaN growth by RF-MBE2015

    • Author(s)
      Y. Hoshikawa, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      Materials Research Society, 2015 Fall Meeting
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2015-12-01 – 2015-12-04
    • Int'l Joint Research
  • [Presentation] Growth temperature dependence of Ga2O3 and In2O3 growth rates in Mist CVD2015

    • Author(s)
      K. Tanuma, T. Yamaguchi, T. Onuma, and T. Honda
    • Organizer
      Materials Research Society, 2015 Fall Meeting
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2015-12-01 – 2015-12-04
    • Int'l Joint Research
  • [Presentation] Defect characterization in GaInN on compressive and strain-free GaN underlying layer2015

    • Author(s)
      N. Toyomitsu, Y. Harada, J. Wang, L. Sang, T. Yamaguchi, T. Honda, Y. Nakano, and M. Sumiya
    • Organizer
      The 6th International Symposium on Growth of III-Nitrides (ISGN-6)
    • Place of Presentation
      Hamamatsu, Japan
    • Year and Date
      2015-11-08 – 2015-11-13
    • Int'l Joint Research
  • [Presentation] Impact of nitridation on GaN growth on (0001)sapphire with an Al layer as a release layer by RF-MBE2015

    • Author(s)
      Y. Hoshikawa, S. Osawa, Y. Matsumoto, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      The 6th International Symposium on Growth of III-Nitrides (ISGN-6)
    • Place of Presentation
      Hamamatsu, Japan
    • Year and Date
      2015-11-08 – 2015-11-13
    • Int'l Joint Research
  • [Presentation] Optical Anisotropy in (010) Plane of beta-Ga2O3 Single Crystals2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-11-03 – 2015-11-06
    • Int'l Joint Research
  • [Presentation] Growth of alpha-(AlGa)2O3 by mist CVD and evaluation of its thermal stability2015

    • Author(s)
      M. Takahashi, T. Hatakeyama, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-11-03 – 2015-11-06
    • Int'l Joint Research
  • [Presentation] Growth temperature dependence of Ga2O3 growth rate by mist CVD2015

    • Author(s)
      K. Tanuma, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-11-03 – 2015-11-06
    • Int'l Joint Research
  • [Presentation] Fabrication of p-type NiO thin films by molecular precursor method2015

    • Author(s)
      R. Goto, T. Onuma, T. Yamaguchi, H. Nagai, M. Sato, and T. Honda
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-11-03 – 2015-11-06
    • Int'l Joint Research
  • [Presentation] Correlation between green fluorescent emission and pits formed on surface of GaInN films2015

    • Author(s)
      N. Toyomitsu, Y. Harada, J. Wang, L. Sang, T. Yamaguchi, T. Honda, Y. Nakano, and M. Sumiya
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-03
    • Int'l Joint Research
  • [Presentation] Comprehensive study on GaN and InN etching by inductively coupled plasma reactive ion etching2015

    • Author(s)
      K. Narutani, T. Yamaguchi, T. Araki, Y. Nanishi, T. Onuma, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-03
    • Int'l Joint Research
  • [Presentation] Fundamental Study on Local Surface Plasmons in Ag-nanocrystallites ZnO films toward Future Applications in Nitride-based LEDs2015

    • Author(s)
      D. Taka, T. Onuma, T. Shibukawa, H. Nagai, T. Yamaguchi, M. Sato, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-03
    • Int'l Joint Research
  • [Presentation] Mist-CVD Growth of In2O32015

    • Author(s)
      T. Kobayashi, K. Tanuma, T. Yamaguchi, T. Onuma, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-03
    • Int'l Joint Research
  • [Presentation] Study on the Phase Transition Temperature of α-(AlGa)2O3 Grown by Mist CVD2015

    • Author(s)
      M. Takahashi, T. Hayakeyama, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-03
    • Int'l Joint Research
  • [Presentation] Investigation of in-situ X-ray reciprocal space mapping measurements in GaInN growth on GaN by RF-MBE2015

    • Author(s)
      M. Sawada, T. Yamaguchi, T. Sasaki, K. Narutani, R. Deki, T. Onuma, T. Honda, M. Takahashi, and Y. Nanishi
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-02
    • Int'l Joint Research
  • [Presentation] Impact of nitridation on GaN growth on sapphire with an Al layer as a sacrifice layer by RF-MBE2015

    • Author(s)
      Y. Hoshikawa, S. Osawa, Y. Matsumoto, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-02
    • Int'l Joint Research
  • [Presentation] AR-XPS measurement of AlOx/AlN/GaN heterostructures2015

    • Author(s)
      D. Isono, S. Takahashi, Y. Sugiura, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-02
    • Int'l Joint Research
  • [Presentation] Discussion of ZnO based film by mist CVD method using molecular precursor solution2015

    • Author(s)
      R. Goto, K. Tanuma, T. Hatakeyama, H. Nagai, T. Yamaguchi, M. Sato, and T. Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-01 – 2015-11-02
    • Int'l Joint Research
  • [Presentation] プラズモンによる青色LEDの高輝度化に向けた研究2015

    • Author(s)
      高大地, 尾沼猛儀、山口智広、本田徹
    • Organizer
      2nd Innovation Forum of Advanced Engineering and Education (IFAEE)
    • Place of Presentation
      工学院大学, 東京
    • Year and Date
      2015-11-01 – 2015-11-02
  • [Presentation] GaInN系LED製作へ向けた結晶成長とデバイスプロセス2015

    • Author(s)
      鳴谷建人, 尾沼猛儀、山口智広、本田徹
    • Organizer
      2nd Innovation Forum of Advanced Engineering and Education (IFAEE)
    • Place of Presentation
      工学院大学, 東京
    • Year and Date
      2015-11-01 – 2015-11-02
  • [Presentation] 情報化社会の快適化に向けたGaN系デバイス製作に関する研究2015

    • Author(s)
      磯野大樹, 尾沼猛儀、山口智広、本田徹
    • Organizer
      2nd Innovation Forum of Advanced Engineering and Education (IFAEE)
    • Place of Presentation
      工学院大学, 東京
    • Year and Date
      2015-11-01 – 2015-11-02
  • [Presentation] ICP-RIEによるGaN,GaInN,InNエッチングとGaInN系LED製作への応用2015

    • Author(s)
      鳴谷建人, 山口智広, 荒木努, 名西憓之, 尾沼猛儀, 本田徹
    • Organizer
      第4回結晶工学未来塾
    • Place of Presentation
      東京農工大学, 小金井, 東京
    • Year and Date
      2015-10-29 – 2015-10-29
  • [Presentation] In-situ X-ray Reciprocal Space Mapping Measurements in GaInN Growth on GaN by RF-MBE2015

    • Author(s)
      T. Yamaguchi, T. Sasaki, K. Narutani, M. Sawada, R. Deki, T. Onuma, T. Honda, M. Takahasi, and Y. Nanishi
    • Organizer
      The 31st North American Conference on Molecular Beam Epitaxy (NAMBE 2015)
    • Place of Presentation
      Mayan Riviera, Mexico
    • Year and Date
      2015-10-04 – 2015-10-07
    • Int'l Joint Research
  • [Presentation] Comprehensive study on inductively coupled plasma reactive ion etching of GaN and InN2015

    • Author(s)
      K. Narutani, T. Yamaguchi, T. Araki, Y. Nanishi, T. Onuma, and T. Honda
    • Organizer
      The 31st North American Conference on Molecular Beam Epitaxy (NAMBE 2015)
    • Place of Presentation
      Mayan Riviera, Mexico
    • Year and Date
      2015-10-04 – 2015-10-07
    • Int'l Joint Research
  • [Presentation] Thermal stability of alpha-(AlGa)2O3 grown by mist CVD2015

    • Author(s)
      M. Takahashi,T. Hatakeyama,T. Onuma,T. Yamaguchi,and T. Honda
    • Organizer
      The 31st North American Conference on Molecular Beam Epitaxy (NAMBE 2015)
    • Place of Presentation
      Mayan Riviera, Mexico
    • Year and Date
      2015-10-04 – 2015-10-07
    • Int'l Joint Research
  • [Presentation] MgZnO growth on (0001)sapphire by mist chemical vapor deposition2015

    • Author(s)
      R. Goto, H. Nagai, T. Yamaguchi, T. Onuma, M. Sato and T. Honda,
    • Organizer
      17th International Conference on II-VI Compounds and Related Materials
    • Place of Presentation
      Paris, France
    • Year and Date
      2015-09-13 – 2015-09-18
    • Int'l Joint Research
  • [Presentation] β-Ga2O3結晶の(010)面における光学的異方性2015

    • Author(s)
      尾沼 猛儀, 齋藤 伸吾, 佐々木 公平, 増井 建和, 山口 智広, 本田 徹, 東脇正高
    • Organizer
      2015年秋季応用物理学会
    • Place of Presentation
      名古屋国際会議場, 愛知
    • Year and Date
      2015-09-13 – 2015-09-16
  • [Presentation] RF-MBE法によるGaN上GaInN成長におけるその場X線逆格子マッピング測定2015

    • Author(s)
      澤田 匡崇, 山口 智広, 佐々木 拓生, 鳴谷 建人, 出来 亮太, 尾沼 猛儀, 本田 徹, 高橋 正光, 名西 憓之
    • Organizer
      2015年秋季応用物理学会
    • Place of Presentation
      名古屋国際会議場, 愛知
    • Year and Date
      2015-09-13 – 2015-09-16
  • [Presentation] ミストCVD法により製作したα-(AlGa)2O3の熱的安定性2015

    • Author(s)
      高橋 幹夫, 畠山 匠, 尾沼 猛儀, 山口 智広, 本田 徹
    • Organizer
      2015年秋季応用物理学会
    • Place of Presentation
      名古屋国際会議場, 愛知
    • Year and Date
      2015-09-13 – 2015-09-16
  • [Presentation] α-Ga2O3 and α-(AlGa)2O3 Buffer Layers in Growth of GaN2015

    • Author(s)
      T. Yamaguchi, T. Hatakeyama, K. Tanuma, T. Hirasaki, H. Murakami, T. Onuma and T. Honda
    • Organizer
      11th International Conference On Nitride Semiconductors (ICNS-11)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2015-08-30 – 2015-09-04
    • Int'l Joint Research
  • [Presentation] Correlation between Deep-level Optical Spectroscopy and Cathodoluminescence on Pits Formed on Surface of GaInN Films2015

    • Author(s)
      N. Toyomitsu, Y. Harada, J. Wang, L. Sang, T. Sekiguchi, T. Yamaguchi, T. Honda, Y. Nakano, and M.Sumiya
    • Organizer
      11th International Conference On Nitride Semiconductors (ICNS-11)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2015-08-30 – 2015-09-04
    • Int'l Joint Research
  • [Presentation] Fabrication of (Ga, In)2O3-x films on GaN-based LED structures by molecular precursor method for near-UV transparent electrodes2015

    • Author(s)
      T. Honda, H. Nagai, S. Fujioka, R. Goto, T. Onuma, T. Yamaguchi, and M.Sato
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      Windwook, Namibia
    • Year and Date
      2015-08-14 – 2015-08-15
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of copper thin films using the molecular precursor method2015

    • Author(s)
      H. Nagai, T. Yamaguchi, T. Onuma, I. Takano, T. Honda and M. Sato
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      Windwook, Namibia
    • Year and Date
      2015-08-14 – 2015-08-15
    • Int'l Joint Research / Invited
  • [Presentation] Study on spontaneous emission in nitride-based LEDs with Ag-nanocrystallites ZnO films fabricated by molecular precursor method2015

    • Author(s)
      T. Onuma, T. Shibukawa, D. Taka, K. Serizawa, E. Adachi, H. Nagai, T. Yamaguchi, J.-S. Jang, M. Sato, and T. Honda
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      Windwook, Namibia
    • Year and Date
      2015-08-14 – 2015-08-15
    • Int'l Joint Research / Invited
  • [Presentation] Growth of Group-III Oxides by Mist Chemical Vapor Deposition and Discussion on Thier Growth Mechanisms2015

    • Author(s)
      T. Yamaguchi, K. Tanuma, H. Nagai, T. Onuma, T. Honda, and M. Sato
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      Windwook, Namibia
    • Year and Date
      2015-08-14 – 2015-08-15
    • Int'l Joint Research / Invited
  • [Presentation] Inductively coupled plasma reactive ion etching of GaN and InN2015

    • Author(s)
      K. Narutani, T. Yamaguchi, T. Araki, Y. Nanishi, T. Onuma, and T. Honda
    • Organizer
      34th Electronic Materials Symposium
    • Place of Presentation
      La Forlet Biwako, Shiga
    • Year and Date
      2015-07-15 – 2015-07-17
  • [Presentation] Growth condition dependence of Ga-In-O films by mist-CVD2015

    • Author(s)
      K. Tanuma, R. Goto, T. Onuma, T. Yamaguchi, and T. Honda
    • Organizer
      34th Electronic Materials Symposium
    • Place of Presentation
      La Forlet Biwako, Shiga
    • Year and Date
      2015-07-15 – 2015-07-17
  • [Presentation] Determination of Direct and Indirect Bandgap-Energies of beta-Ga2O3 by Polarized Transmittance and Reflectance Spectroscopy2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      57th Electronic Materials Conference (EMC-57)
    • Place of Presentation
      Ohio, USA
    • Year and Date
      2015-06-21 – 2015-06-24
    • Int'l Joint Research
  • [Presentation] Photoelectron spectra of AlN/GaN heterostructure observed by AR-XPS2015

    • Author(s)
      D. Isono, S. Takahashi, Y. Sugiura, T. Yamaguchi, T. Honda
    • Organizer
      The 7th Asia-Pacific Workshop on Widegap Semiconductors (APWS 2015)
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2015-05-17 – 2015-05-20
    • Int'l Joint Research / Invited
  • [Presentation] Correlation between green fluorescence and impurities on pits formed on surface of InGa2015

    • Author(s)
      N. Toyomitsu, Y. Harada, J. Wang, L. Sang, T. Sekiguchi, T. Yamaguchi, T. Honda, Y. Nakano, M. Sumiya
    • Organizer
      The 5th Asia-Arab Sustainable Energy Forum & 7th Int. Workshop on SSB (5AASEF)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2015-05-12 – 2015-05-12
    • Int'l Joint Research
  • [Presentation] 誘導結合型プラズマ反応性イオンエッチングによるInN エッチング2015

    • Author(s)
      鳴谷建人, 山口智広, 荒木努, 名西憓之, 尾沼猛儀, 本田徹
    • Organizer
      第7回窒化物半導体結晶成長講演会
    • Place of Presentation
      東北大学, 宮城
    • Year and Date
      2015-05-09 – 2015-05-09
  • [Presentation] Growth mechanisms of InN and its alloys using droplet elimination by radical beam irradiation2015

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma,, T. Honda, Y. Nanishi
    • Organizer
      Energy Materials Nanotechnology meeting (EMN)
    • Place of Presentation
      Phuket, Thailand,
    • Year and Date
      2015-05-08 – 2015-05-11
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of ZnO thin film by mist CVD using molecular precursor solution2015

    • Author(s)
      R. Goto, T. Yasuno, H. Nagai, H. Hara, M. Sato, T. Honda
    • Organizer
      Conference on LED and its industrial application ’15 (LEDIA’15)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-04-22 – 2015-04-24
    • Int'l Joint Research
  • [Presentation] Fundamental study on growth of α-(AlGa)2O3 alloys by mist CVD-A study on growth rate of α-Al2O3 compared with α-Ga2O32015

    • Author(s)
      M. Takahashi, T. Hatakeyama, T. Onuma, T. Yamaguchi, T. Honda
    • Organizer
      Conference on LED and its industrial application ’15 (LEDIA’15)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-04-22 – 2015-04-24
    • Int'l Joint Research
  • [Presentation] Aluminum growth on sapphire substrate with surface nitridation by RF-MBE2015

    • Author(s)
      Y. Hoshikawa, S. Osawa, Y. Matsumoto, T. Yamaguchi, T. Onuma, T. Honda
    • Organizer
      Conference on LED and its industrial application ’15 (LEDIA’15)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-04-22 – 2015-04-24
    • Int'l Joint Research
  • [Presentation] Optical Anisotropy in b-Ga2O3 Crystals Grown by Melt-Growth Methods2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki,
    • Organizer
      Conference on LED and its industrial application ’15 (LEDIA’15)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-04-22 – 2015-04-24
    • Int'l Joint Research

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Published: 2017-01-06  

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