Measurement of Young's modulus of nanometer order thickness Al2O3

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420704
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: The University of Tokyo
• Principal Investigator: KAGAWA YUTAKA 東京大学, 工学(系)研究科(研究院), 教授 (50152591)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: ヤング率 / アルミナ / ナノ厚さ / チューブ / 製造方法 / 片持ち梁

Outline of Final Research Achievements

Effect of thickness on Young’s modulus of polycrystalline Al2O3 has been measured experimentally. Several tens nano-meter Al2O3 wall micron-meter order diameter tube was fabricated using atomic layer deposition process and fugitive method. Al2O3 layer was deposited on a carbon fiber substrate by ALD process. As deposited carbon fiber was exposed to oxidation environment to remove the core carbon fiber. An ultrathin Al2O3 tube was successfully obtained using the present procedure. Young’s modulus of the tube was measured in ambient air condition using simple cantilever method. The result clearly shows tendency of the thickness dependence of Young’s modulus of the Al2O3 tube. However, due to large scattering of the measured Young’s modulus, exact value of Young’s modulus is difficult to determine within the present study. The present research result opens new simple procedure for measurement of the effect of thickness on Young’s modulus of Al2O3.

Free Research Field

複合材料・物性