Structural analysis of DLC film by means of synchrotron light

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420783
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Toyota Central R&D Lab., Inc.
• Principal Investigator: ISEKI TAKASHI 株式会社豊田中央研究所, 材料・プロセス1部 表面改質研究室, 主任研究員 (60394897)
• Co-Investigator(Renkei-kenkyūsha): YAMAGUCHI SATOSHI 株式会社豊田中央研究所, 分析部 量子ビーム解析研究室, 研究員 (10394892) ; NOZAKI HIROSHI 株式会社豊田中央研究所, 分析部 量子ビーム解析研究室, 主任研究員 (90394890) ; TAKAHASHI NAOKO 株式会社豊田中央研究所, 分析部 組織解析研究室, 技師 (90394981) ; OZAWA YASUHIRO 株式会社豊田中央研究所, 材料・プロセス1部 表面改質研究室, 技師補 (60557940)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: DLC / 動径分布関数 / 構造解析 / X線散乱 / 中性子散乱

Outline of Final Research Achievements

Structural analysis of diamond-like carbon (DLC) prepared by plasma-enhanced chemical vapor deposition was carried out by means of grazing incidence synchrotron X-ray scattering (GIXS). The obtained radial distribution functions analyzed by the X-ray scattering spectra suggested that an increase of the electric power input enhanced long-range ordering due to sp2 carbon in the film. These results showed good correlations with those of Raman spectra and hardness measurements of the films. In addition, the existence of C-D covalent bonds in a graphite network was confirmed by the RDFs calculated with neutron scattering measurements of deuterized DLC powder.

Free Research Field

薄膜工学、非晶質材料、表面処理