2015 Fiscal Year Final Research Report
Selective separation and recovery process of tetramethylammonium hydroxide from waste water of photoresist process
| Project/Area Number |
25420811
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Properties in chemical engineering process/Transfer operation/Unit operation
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| Research Institution | The University of Kitakyushu |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIZUKA Kazuharu 北九州市立大学, 国際環境工学部, 教授 (70191567)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | イオン交換 |
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| Outline of Final Research Achievements |
Fluidized bed column adsorption system was investigated to develop separation process of tetramethylammonium hydroxide (TMAH). Effective adsorption of TMAH was achieved with activated carbon by closed circuit type of the fluidized bed column adsorption system. In addition, the adsorption rate of TMAH with activated carbon in the fluidized bed column adsorption system was successfully expressed by pseudo second order rate model, and the rate constant was consistent to that in the batchwise system.
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| Free Research Field |
分離工学
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