2014 Fiscal Year Final Research Report
Proximity and Tactile Measurement Using a Multifunctional MEMS Sensor
| Project/Area Number |
25540069
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Perceptual information processing
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| Research Institution | Niigata University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
NOMA Haruo 立命館大学, 情報理工学部, 教授 (00374108)
OKUYAMA Masanori 大阪大学, 大学院基礎工学研究科, 名誉教授 (60029569)
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| Project Period (FY) |
2013-04-01 – 2015-03-31
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| Keywords | 触覚センサ / 近接センサ / マルチモーダルセンサ / MEMS |
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| Outline of Final Research Achievements |
A miniature sensor to detect both proximity and touch force has been investigated.Touch force can be detected as deflection of micro structures in silicone rubber. On the other hand, proximity can be detected as conductivity change in semiconductor by reflected light from the object. Moreover, in the case of transparent object or extremely short distance, proximity can be detected as change of electric field distribution around the sensor instead of an optical method.
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| Free Research Field |
センサ・マイクロマシン工学
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