2014 Fiscal Year Final Research Report
Fabrication of titanium nitride plasmonic device corresponing to visible light
Project/Area Number |
25600019
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Research Category |
Grant-in-Aid for Challenging Exploratory Research
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Allocation Type | Multi-year Fund |
Research Field |
Nanomaterials chemistry
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Research Institution | Hokkaido University |
Principal Investigator |
MATSUO YASUTAKA 北海道大学, 電子科学研究所, 准教授 (90374652)
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Project Period (FY) |
2013-04-01 – 2015-03-31
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Keywords | プラズモン |
Outline of Final Research Achievements |
In this study, I tried to fabricate a nanostructure of titanium nitride by using electron beam lithography system. And new devices which had plasmon resonance corresponding to visible light were fabricated. As a result, titanium thin film including nitrogen was formed by a reactive sputtering system. And nanostructure of titanium nitride (diameter 100nm) was formed by lift off method of electron beam lithography. In addition, I measured raman spectra of Rhodamine molecules on titanium nitride film by micro raman spectroscope. In that case, I showed that raman signal was enhanced by roughness of titanium nitride film surface.
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Free Research Field |
光物性
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