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2013 Fiscal Year Final Research Report

Synthesis of p-type transparent conductive Ti-oxides based films utilizing interface reaction

Research Project

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Project/Area Number 25600040
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Nanomaterials engineering
Research InstitutionOsaka University

Principal Investigator

ITO Kazuhiro  大阪大学, 接合科学研究所, 教授 (60303856)

Co-Investigator(Renkei-kenkyūsha) 大西 隆  神鋼リサーチ株式会社
Project Period (FY) 2013-04-01 – 2014-03-31
Keywords透明導電膜 / Ti基酸化物 / p型伝導 / 界面反応
Research Abstract

We recently found that an amorphous Ti oxide layer consisting of mainly TiO2 forming at the interface between Cu(Ti) and ITO would be a p-type transparent conductive film in the previous study on contact resistance at the Cu(Ti)/ITO junction. Thus, purpose of the present study is to develop a synthesis of the reaction film on glass substrates and to characterize its optical and electrical properties. Cu(10 at.%Ti) alloy films were deposited on 40 nm-thick ITO/Glass substrates. The Cu(Ti)/ITO/Glass samples were annealed in ultrahigh vacuum at 400C for 6 h. The amorphous Ti-oxide layer with about 20 nm in thickness formed on the glass substrate, and the ITO layer was eliminated due to the reaction. The amorphous Ti-oxide films exhibited transmittance of about 70% in visible light region, sheet resistance of about 1.0 x 10^3 ohm/sq., positive Hall coefficient, and carrier density of about 1.0 x 10^22 cm^-3 at RT. The univalent cation Cu+ would be essential for the p-type conductivity.

  • Research Products

    (2 results)

All 2014 2013

All Presentation (2 results)

  • [Presentation] Synthesis of Low Contact-Resistance Cu(Ti) /ITO Junctions2014

    • Author(s)
      Kazuhiro Ito, W. Nakagawa, Y. Shirai, M. Murakami
    • Organizer
      TMS 143rd Annual Meeting & Exhibition
    • Place of Presentation
      San Diego Convention Center (California, USA)
    • Year and Date
      20140216-20
  • [Presentation] p型Ti酸化物透明導電膜の作製と物性評価2013

    • Author(s)
      京大工林徳樺(現クボタ), 阪大接合研伊藤和博, 小濱和之, 神鋼リサーチ大西隆, 京大工白井泰治, 立命館村上正紀
    • Organizer
      (公社)日本金属学会2013年秋期大会
    • Place of Presentation
      金沢大学(石川県)
    • Year and Date
      20130917-19

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Published: 2015-06-25  

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