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2014 Fiscal Year Final Research Report

Development of crystal orientation analysis using symmetric property of light reflection

Research Project

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Project/Area Number 25600085
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionTohoku University

Principal Investigator

KUTSUKAKE Kentaro  東北大学, 金属材料研究所, 助教 (00463795)

Project Period (FY) 2013-04-01 – 2015-03-31
Keywords結晶方位解析 / 結晶工学 / 面方位 / 多結晶 / 大面積ウェーハ
Outline of Final Research Achievements

This study aimed to establish theory and system of a unique analysis method of crystal orientation. This method is based on an analysis of symmetry and variation property of light reflection from sample surface, which contains crystal orientation information of the surface. It is possible in principle to measure a crystal orientation image map of a large area in a short time. I designed and introduced an experiment system for this research. As a result of investigations, we obtained knowledge in specifications of the analysis system for the determination of crystal orientations and the potential of this method.

Free Research Field

結晶工学

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Published: 2016-06-03   Modified: 2016-09-08  

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