Super resolution of soft X-ray microscope by structured light

2014 Fiscal Year Final Research Report

• Project/Area Number: 25600136
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Quantum beam science
• Research Institution: Tohoku University
• Principal Investigator: EJIMA Takeo 東北大学, 多元物質科学研究所, 准教授 (80261478)
• Co-Investigator(Kenkyū-buntansha): YANAGIHARA Mihiro 東北大学, 多元物質科学研究所, 教授 (40174552)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: 軟X線顕微鏡 / 多層膜光学系

Outline of Final Research Achievements

For super resolution of microscope in soft X-ray region, it was developped that a grazing incidence condeser to illuminate a sample by a structured light and a 5 axes manipulator to obtain phase information of the light passed through a sample. The grazing incidence condenser is developed for strucutred illumination with the use of a point light source. The condenser is composed of toroidal mirrors and the mirror was fabricated and evaluated. A reflection multilayer was deposited on the mirror surface and measured reflectance of the mirror is higher than 0.32 at 4.5 nm wavelength. The 5 axes manipulator was designed and fabricated to obtain phase information of the light, and the average displacement evaluated in x/y/z directions was 25nm/pulse and 2x10^{-6} rad/pulse in θx/θy rotational directions. With the use of these instruments, soft X-ray images of mouse liver-cell stained by Hematoxylin were taken.

Free Research Field

軟X線光学