Development of novel fabrication process for ultraprecise X-ray mirrors

2014 Fiscal Year Final Research Report

• Project/Area Number: 25600140
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Quantum beam science
• Research Institution: Osaka University
• Principal Investigator: MATSUYAMA Satoshi 大阪大学, 工学(系)研究科(研究院), 助教 (10423196)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: X線集光ミラー / 放射光 / イオンビーム加工

Outline of Final Research Achievements

Development of ultraprecise X-ray focusing mirrors is essential for improving micro-X-ray analysis and X-ray microscopy. However, it is quite difficult to fabricate such focusing mirrors, which has relatively large numerical aperture, due to its steeply curved shape. In this research, we developed a computer-controlled ion beam figuring system that can fabricate such focusing mirrors precisely. An elliptical mirror with an figure accuracy of 1 nm was successfully fabricated using the developed system.

Free Research Field

X線光学，超精密加工