2014 Fiscal Year Final Research Report
Characterization of InGaN films by synchrotron radiation microdiffraction with using parabolic refractive X-ray lenses made of quartz glass
| Project/Area Number |
25600151
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Quantum beam science
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| Research Institution | Japan Synchrotron Radiation Research Institute |
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Principal Investigator |
KIMURA SHIGERU 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主席研究員 (50360821)
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| Co-Investigator(Kenkyū-buntansha) |
IMAI Yasuhiko 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (30416375)
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| Research Collaborator |
YOKOGAWA Toshiya
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| Project Period (FY) |
2013-04-01 – 2015-03-31
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| Keywords | 放射光 / 集光素子 / 屈折レンズ / 石英 / GaInN |
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| Outline of Final Research Achievements |
We have fabricated planar parabolic refractive X-ray lenses made of quartz glass for high energy X-ray focusing by optical lithography and dry etching techniques. We succeeded a 100-μm-deep etching, realizing that high efficient microfocusing for high energy X-rays.
Using the lenses for 30 keV, we characterized thermal stability of InGaN multi quantum well strictures.
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| Free Research Field |
Ｘ線光学
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