A study on NEMS-Casimir multifunction sensors

2014 Fiscal Year Final Research Report

• Project/Area Number: 25630138
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: YAMANE Daisuke 東京工業大学, 精密工学研究所, 助教 (70634096)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: マイクロ・ナノデバイス / ナノギャップ / ナノエレクトロニクス / Casimir効果 / 金めっき / 光ミキサ / テラヘルツ波 / 静電容量型センサ

Outline of Final Research Achievements

First, we have theoretically analyzed the behavior of nano structures under Casimir effect. Then, we have developed proof-of-concept devices in micro-meter scale, and experimentally evaluated their fundamental characteristics. The results shows that the developed micro structures can be used to achieve not only NEMS-Casimir sensors but also various miniaturized high-sensitivity sensors.
In this work, we have published 7 journal papers (2 papers are to be published), and presented 3 invited talks (one talk is to be presented), 6 international conferences, an international workshop, 4 domestic symposiums, and 14 domestic conferences. The research results won 4 academic prizes.
Our research was reported by a TV program, 5 newspapers, 4 web news, a lecture on National United university in Taiwan (presented by Daisuke Yamane), and 5 press releases in Tokyo Institute of Technology.

Free Research Field

電気電子工学