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2014 Fiscal Year Annual Research Report

Siナノpn接合を用いたドーパント原子型トンネルダイオード

Research Project

Project/Area Number 25630144
Research InstitutionShizuoka University

Principal Investigator

田部 道晴  静岡大学, 電子工学研究所, 教授 (80262799)

Co-Investigator(Kenkyū-buntansha) 水田 博  北陸先端科学技術大学院大学, マテリアルサイエンス研究科, 教授 (90372458)
Project Period (FY) 2013-04-01 – 2015-03-31
Keywords電子デバイス・機器 / シリコンナノpn接合 / ドーパント原子 / トンネルダイオード / 高濃度ドーピング
Outline of Annual Research Achievements

本研究計画は、接合部が微小のSiナノpn接合の特徴を生かした新原理デバイスを提案・実証することを目指すものであり、特にナノpn接合で顕著となるドーパント原子の個別性を利用して、ドナー・アクセプター準位間の共鳴トンネリングを用いた原子型トンネルダイオードを世界に先駆けて実現することを目標とする。前年度(H25年度)は、pnダイオードのドーパント濃度は1E18cm-3のオーダーであって、低温域で拡散電流にランダムテレグラフシグナル(RTS)が現れること、これが、pn接合部の個別オーパントの帯電効果によるものであることを報告した。
H26年度は、バンド間トンネル電流を実現するために、より高濃度(約1E20cm-3)の2次元(極薄膜)pnダイオードを作製し、低温で明瞭な負性微分コンダクタンス(NDC)を観測した。これは、通常のトンネルダイオードで見られる特性であって、特に新しいものではない。しかし、同一水準のいくつかのダイオードでこのNDCに重畳するように鋭い電流ピークが観測された。これは、接合部のドーパント準位を介した「増強された共鳴トンネル」と解釈され、大きな発見となった。ドーパント準位を介するとバンド間トンネリングが増大することは第一原理計算からも裏付けられた。
また、高濃度領域の電位分布をKFMで観測したところ、ドーパントの配置揺らぎに伴う大きな電位の揺らぎが観測され、これが接合部で大きな役割を果たしている可能性もある。
以上のことから、接合部でのドーパントを介したバンド間トンネリングを観測することができ、本計画の当初の目標をおおむね達成することができたと考える。

  • Research Products

    (39 results)

All 2015 2014 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 6 results) Presentation (31 results) (of which Invited: 5 results) Remarks (1 results)

  • [Journal Article] Tunneling transport in quantum dots formed by coupled dopant atoms2015

    • Author(s)
      Daniel Moraru, Arup Samanta, Takahiro Tsutaya, Yuki Takasu, Takeshi Mizuno, Michiharu Tabe
    • Journal Title

      Advanced Materials Research

      Volume: 1117 Pages: 78-81

    • DOI

      10.4028/www.scientific.net/AMR.1117.78

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Kelvin Probe Force Microscope Observation of Donors' Arrangement in Si Transistor Channel2015

    • Author(s)
      Krzysztof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Journal Title

      Advanced Materials Research

      Volume: 1117 Pages: 82-85

    • DOI

      10.4028/www.scientific.net/AMR.1117.82

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Transport spectroscopy of coupled donors in silicon nano-transistors2014

    • Author(s)
      Daniel Moraru, Arup Samanta, Le The Anh, Takeshi Mizuno, Hiroshi Mizuta, Michiharu Tabe
    • Journal Title

      Scientific Reports

      Volume: 4 Pages: 6219-1~6219-6

    • DOI

      http://dx.doi.org/10.1038/srep06219

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] The impacts of electronic state hybridization on the binding energy of single phosphorus donor electrons in extremely downscaled silicon nanostructures2014

    • Author(s)
      Le The Anh, Daniel Moraru, Muruganathan Manoharan, Michiharu Tabe, Hiroshi Mizuta
    • Journal Title

      Journal of Applied Physics

      Volume: 116 Pages: 063705-1-9

    • DOI

      http://dx.doi.org/10.1063/1.4893181

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Observation of Tunneling Effects in Lateral Nanowire pn Junctions2014

    • Author(s)
      Sri Purwiyanti, Arief Udhiarto, Daniel Moraru, Takeshi Mizuno, Djoko Hartanto, Michiharu Tabe
    • Journal Title

      Makara Journal of Technology

      Volume: 18 Pages: 91-95

    • DOI

      10.7454/mst.v18i2.2948

    • Peer Reviewed
  • [Journal Article] Individuality of Dopants in Silicon Nano-pn Junctions2014

    • Author(s)
      Daniel Moraru , Sri Purwiyanti, Roland Nowak , Takeshi Mizuno, Arief Udhiarto, Djoko Hartanto , Ryszard Jablonski , Michiharu Tabe
    • Journal Title

      MATERIALS SCIENCE MEDZIAGOTYRA

      Volume: 20 Pages: 129-131

    • DOI

      http://dx.doi.org/10.5755/j01.ms.20.2.6312

    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Potential Profile and Photovoltaic Effect in Nanoscale Lateral pn Junction Observed by Kelvin Probe Force Microscopy2014

    • Author(s)
      Roland Nowak, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Journal Title

      Thin Solid Films

      Volume: 557 Pages: 249-253

    • DOI

      10.1016/j.tsf.2013.08.115

    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Interactions of individual dopants and macroscopic quantum dots in weakly-doped nanoscale SOI-FETs2015

    • Author(s)
      Daniel Moraru, Yuuki Takasu, Arup Samanta, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-12
  • [Presentation] Electric-field-assisted formation of an interfacial double-donor molecule in Si nano-transistors2015

    • Author(s)
      Arup Samanta, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-12
  • [Presentation] Surface potential observation of heavily-doped Si by KPFM2015

    • Author(s)
      Krzystof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-12
  • [Presentation] Effect of Individual Dopants in Esaki Tunneling Diodes2015

    • Author(s)
      Hoang Nhat Tan, Daniel Moraru, Ryosuke Unno, Anak Agung Ngurah Gde Sapteka, Sri Purwiyanti,Le The Anh, Muruganathan Manoharan,Takeshi Mizuno, Hiroshi Mizuta, Djoko Hartanto, Michiharu Tabe
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-12
  • [Presentation] 低濃度リンドープによるドーパント原子MOSFET2015

    • Author(s)
      Yuuki Takasu, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-11
  • [Presentation] Tunneling Transport via Dopant-induced Quantum Dots in Silicon Nano-devices2015

    • Author(s)
      Daniel Moraru, Krzysztof Tyszka, Arup Samanta, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      3rd International Conference on Nanoscience and Nanotechnology(ICONN2015)
    • Place of Presentation
      SRM University(Chennai・INDIA)
    • Year and Date
      2015-02-05
    • Invited
  • [Presentation] 少数個のドーパントを利用したSiナノデバイス-ドーパントのパラダイムシフト2015

    • Author(s)
      田部道晴
    • Organizer
      電子情報通信学会研究会 第1回SNT研究会
    • Place of Presentation
      東京大学本郷キャンパス(東京都・文京区)
    • Year and Date
      2015-02-05
    • Invited
  • [Presentation] Interaction between Dopant Atoms and Interface in Nanoscale Transistors2015

    • Author(s)
      Arup Samanta, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      3rd International Conference on Nanoscience and Nanotechnology(ICONN2015)
    • Place of Presentation
      SRM University (Chennai・INDIA)
    • Year and Date
      2015-02-04
  • [Presentation] Interface-assisted merging of two donor atoms in ultrathin Si-transistors2015

    • Author(s)
      Arup Samanta, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      International Symposium towards the Future of Advanced Researches in Shizuoka University 2015
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2015-01-27 – 2015-01-28
  • [Presentation] KPFM observation of donors in transistor channels doped with different concentrations2015

    • Author(s)
      Krzysztof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      International Symposium towards the Future of Advanced Researches in Shizuoka University 2015
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2015-01-27 – 2015-01-28
  • [Presentation] Atomic and molecular behavior in tunneling transport via dopants in nano-transistors2015

    • Author(s)
      Daniel Moraru, Arup Samanta, Yuki Takasu, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      International Symposium towards the Future of Advanced Researches in Shizuoka University 2015
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2015-01-27 – 2015-01-28
  • [Presentation] Silicon Nanoscale Transistors with Dopant-Induced Quantum Dots2014

    • Author(s)
      Daniel Moraru, Krzysztof Tyszka, Arup Samanta,Yuuki Takasu,Takahiro Tsutaya, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      The 2nd International Conference on Nano Electronics Research and Education (ICNERE2014)
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2014-11-24
  • [Presentation] Transport Phenomena in Nanoscale Silicon Tunneling pn Diodes2014

    • Author(s)
      Anak Agung Ngurah Gde Sapteka, Sri Purwiyanti, Hoang Nhat Tan, Ryosuke Unno, Daniel Moraru,Takeshi Mizuno, Arief Udhiarto, Djoko Hartanto, Michiharu Tabe
    • Organizer
      The 2nd International Conference on Nano Electronics Research and Education (ICNERE2014)
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2014-11-24
  • [Presentation] KPFM observation of donors in field effect transistor channel2014

    • Author(s)
      Krzysztof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski , Michiharu Tabe
    • Organizer
      The 16th Takayanagi Kenjiro Memorial Symposium
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2014-11-11
  • [Presentation] Single Electron Transport in Double-Donor System at Si/SiO2 Interface in Ultrathin SOI-FETs2014

    • Author(s)
      Arup Samanta, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      The 16th Takayanagi Kenjiro Memorial Symposium
    • Place of Presentation
      静岡大学浜松キャンパス(浜松市)
    • Year and Date
      2014-11-11
  • [Presentation] Low-temperature spectroscopy of donor states in silicon nano-channels2014

    • Author(s)
      Daniel Moraru, Arup Samanta,Takahiro Tsutaya, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      The 16th Takayanagi Kenjiro Memorial Symposium
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県・浜松市)
    • Year and Date
      2014-11-11
  • [Presentation] 個別ドーパント原子のSiデバイスへの応用2014

    • Author(s)
      田部道晴
    • Organizer
      応用物理学会 中国四国支部 将来デバイスに向けたシリコン系基盤研究の集い
    • Place of Presentation
      島根大学(島根県・松江市)
    • Year and Date
      2014-11-07
    • Invited
  • [Presentation] シリコン中の少数個不純物の電子状態とデバイス応用2014

    • Author(s)
      Daniel Moraru,Takeshi Mizuno, Michiharu Tabe
    • Organizer
      電子情報通信学会 東北支部学術講演会
    • Place of Presentation
      秋田大学手形キャンパス(秋田県・秋田市)
    • Year and Date
      2014-10-10
    • Invited
  • [Presentation] Impact of Doping Concentration Regimes on Low-Temperature Tunneling in Nanoscale SOI-FETs2014

    • Author(s)
      Daniel Moraru, Yuuki Takasu, Takahiro Tsutaya, Arup Samanta, Le The Anh, Muruganathan Manoharan, Takeshi Mizuno, Hiroshi Mizuta, Michiharu Tabe
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道・札幌市)
    • Year and Date
      2014-09-18
  • [Presentation] Effect of Dopants in Tunnel Barriers of Selectively Doped SOI-FETs2014

    • Author(s)
      Arup Samanta, Daniel Moraru, Takahiro Tsutaya, Le The Anh, Muruganathan Manoharan,Takeshi Mizuno, Hiroshi Mizuta, Michiharu Tabe
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道・札幌市)
    • Year and Date
      2014-09-18
  • [Presentation] KPFM Imaging of Donor Clusters in Selectively-Doped SOI-FET2014

    • Author(s)
      Krzystof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道・札幌市)
    • Year and Date
      2014-09-18
  • [Presentation] Interband Tunncling through Individual Dopants in Nanoscale pn Junctions2014

    • Author(s)
      Hoang Nhat Tan, Purwiyanti Sri, Daniel Moraru, Le The Anh, Muruganathan Manoharan,Takeshi Mizuno, Hiroshi Mizuta, Hartanto Djoko, Michiharu Tabe
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道・札幌市)
    • Year and Date
      2014-09-18
  • [Presentation] Study of interband tunneling in nanoscale Si pn junctions2014

    • Author(s)
      Sri Purwiyanti Surya,Hoang Nhat Tan,Daniel Moraru, Takeshi Mizuno,Djoko Hartanto, Michiharu Tabe
    • Organizer
      Inter-Academia 2014
    • Place of Presentation
      Riga Technical University(Riga・LATVIA)
    • Year and Date
      2014-09-12
  • [Presentation] Impact of Dopant Induced States on Interband Tunneling in Nanoscale pn Junctions2014

    • Author(s)
      Hoang Nhat Tan, Arup Samanta, Daniel Moraru, Yohei Kuzuya, Krzysztof Tyszka, Le The Anh, Takeshi Mizuno, Ryszard Jablonski, Hiroshi Mizuta, Michiharu Tabe
    • Organizer
      2014 International Conference on Solid State Devices and Materials (SSDM 2014)
    • Place of Presentation
      つくば国際会議場(茨城県・つくば市)
    • Year and Date
      2014-09-10
  • [Presentation] KPFM Observation of Quantum Dots Induced by Clustered Donors in Selectively-Doped SOI-FETs2014

    • Author(s)
      Krzysztof Tyszka, Arup Samanta, Daniel Moraru, Yohei Kuzuya, Le The Anh, Takeshi Mizuno, Ryszard Jablonski, Hiroshi Mizuta, Michiharu Tabe
    • Organizer
      2014 International Conference on Solid State Devices and Materials (SSDM 2014)
    • Place of Presentation
      つくば国際会議場(茨城県・つくば市)
    • Year and Date
      2014-09-10
  • [Presentation] Kelvin Probe Force Microscope Observation of Donors’ Arrangement in Si Transistor Channel2014

    • Author(s)
      Krzysztof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
    • Organizer
      Inter-Academia 2014
    • Place of Presentation
      Riga Technical University(Riga・LATVIA)
    • Year and Date
      2014-09-10
  • [Presentation] Tunneling Transport in Quantum Dots Formed by Coupled Dopant Atoms2014

    • Author(s)
      Daniel Moraru, Arup Samanta, Takahiro Tustaya, Yuuki Takasu,Takeshi Mizuno, Michiharu Tabe
    • Organizer
      Inter-Academia 2014
    • Place of Presentation
      Riga Technical University(Riga・LATVIA)
    • Year and Date
      2014-09-10
  • [Presentation] Impact of Individual Atoms on Si Nano Electronic and Photonic Devices2014

    • Author(s)
      Michiharu Tabe
    • Organizer
      3rd International Conference on Advanced Material and Practical Nanotecnology(ICAMPN)
    • Place of Presentation
      JIEXPO KEMAYORAN(Jakarta・INDONESIA)
    • Year and Date
      2014-08-15
    • Invited
  • [Presentation] Control of Electron Transport Regimes via Single- and Multiple-Donors in Nano-Channel SOI-FETs2014

    • Author(s)
      Daniel Moraru, Arup Samanta, Takahiro Tsutaya, Yuuki Takasu, Le The Anh, Muruganathan Manoharan, Takeshi Mizuno, Hiroshi Mizuta, Michiharu Tabe
    • Organizer
      2014 IEEE Silicon Nanoelectronics Workshop
    • Place of Presentation
      Hilton Hawaiian Village(Honolulu・USA)
    • Year and Date
      2014-06-09
  • [Presentation] Study of Quantized-Energy Effects in Si Nanoscale Lateral pn Junction Diodes2014

    • Author(s)
      Sri Purwiyanti, Hoang Nhat Tan, Daniel Moraru, Le The Anh, Muruganathan Manoharan, Takeshi Mizuno, Hiroshi Mizuta, Djoko Hartanto, Michiharu Tabe
    • Organizer
      2014 IEEE Silicon Nanoelectronics Workshop
    • Place of Presentation
      Hilton Hawaiian Village(Honolulu・USA)
    • Year and Date
      2014-06-08
  • [Presentation] Electron Transport in Double-Donor Systems at Si/SiO2 Interface in SOI-FETs2014

    • Author(s)
      Arup Samanta, Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
    • Organizer
      2014 IEEE Silicon Nanoelectronics Workshop
    • Place of Presentation
      Hilton Hawaiian Village(Honolulu・USA)
    • Year and Date
      2014-06-08
  • [Remarks] 静岡大学 電子工学研究所 田部道晴研究室ホームページ

    • URL

      http://www.rie.shizuoka.ac.jp/~nanohome/

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Published: 2016-06-01  

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