Thin film magnetic field sensor inside body at room temperature

2015 Fiscal Year Final Research Report

• Project/Area Number: 25630172
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Measurement engineering
• Research Institution: Tohoku Gakuin University
• Principal Investigator: YABUKAMI Shin 東北学院大学, 工学部, 教授 (00302232)
• Co-Investigator(Kenkyū-buntansha): HAGA Yoichi 東北大学, 大学院機械系, 教授 (00282096)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 計測システム

Outline of Final Research Achievements

A very sensitive thin film sensor was developed using a meandering coplanar line fabricated from SrTiO film (3 μm thick), amorphous CoNbZr film (1.0 mm x 2.45 mm, 0.3 μm-2 μm thick) and Cu/Cr film (2 μ m/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 300 degrees/Oe being achieved. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of around 0.5-1 micro m. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film. A sensor module was composed of meandering sensor element and commercial IC. A resolution of about 100 pT was obtained the module. We succeeded in wireless magnetic field measurement using the sensor module.

Free Research Field

磁気工学、計測工学