Creation of super hard nanocomposite coatings selfassembled by oxidation

2015 Fiscal Year Final Research Report

• Project/Area Number: 25630325
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Material processing/Microstructural control engineering
• Research Institution: University of Toyama
• Principal Investigator: Nose Masateru 富山大学, 芸術文化学部, 教授 (70269570)
• Co-Investigator(Kenkyū-buntansha): MATSUDA KENJI 富山大学, 大学院理工学研究部, 教授 (00209553)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 酸化による自己組織化 / 硬質薄膜 / 酸化物 / 窒酸化物 / インデンテーション硬さ / CrAlN/BN複合膜 / AlN/SiCN複合膜

Outline of Final Research Achievements

The indentation hardness of a coating of CrAlN/BN series increased from 36 GPa as deposited to 45 GPa at maximum after a heat treatment at 800 º C for 1 hour in ambient air. After that the hardness decreased gradually, but it kept at 37 GPa even after a heat treatment for 8 hours. This characteristic of the CrAlN/BN coatings results in the formation of a dense & hard oxide layer on the surface of the coatings after the heat treatment. It is also revealed that the oxide layer has high hardness and inhibitory acction to oxidation of CrN.
In the case of AlN/SiCN coatings, the indentation hardness increased from 28 GPa to 31 GPa after heat treatment at 800 º C for 1 hour in an Ar gas atmosphere mixed with oxygen (0 to 5%). This phenomenon results in the formation of dense oxynitride (AlOxNy) layer on the surface of the AlN/SiCN coatings.

Free Research Field

工学