Phenomenological approach to low temperature plasma for surface change of next-generation material

2014 Fiscal Year Final Research Report

• Project/Area Number: 25630329
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Tottori University
• Principal Investigator: KAWAZOE Hiromitsu 鳥取大学, 工学(系)研究科(研究院), 教授 (40260591)
• Co-Investigator(Renkei-kenkyūsha): YAMADA Gouji 鳥取大学, 大学院工学研究科, 助教 (90588831)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: 低温プラズマ / 表面波プラズマ / 低電離プラズマ / 電子密度 / 電子温度 / 表面改質

Outline of Final Research Achievements

SWP(Surface Wave Plasma) generator with a cylider chamber was constructed to investigate the plasma characteristics. Wettability of a copper plate was estimated by the contact angle of a water droplet on the plate.The SWP characteristics was studied by such the conventional methods as the Boltzman plot, the PAP(Plasma Absorption Probe) and the double probe methods, and the new technique of the CR(Collisional-Radiative) method. Furthermore, a two-wave Mach-Zehnder interferometry was also applied to the SWP.
The wettability changes in the location of the SWP chamber and the electronic excited temperature of argon plasma is about 6000K, which is 2000K higher than oxigen plasma. The electron number density is 10^11-10^12/cc and the higher density was found along the center axis of the chamber. The CR model estimates the electronic tenperature to be 26700K and is very close to the temperature by the double probe. The two-wave interferometry was conformed to be an usefull technique.

Free Research Field

流体工学、航空宇宙工学