2014 Fiscal Year Final Research Report
High-speed nano optical measurement with high throughput optical probe
| Project/Area Number |
25706024
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (A)
|
| Allocation Type | Partial Multi-year Fund |
|---|
| Research Field |
Thin film/Surface and interfacial physical properties
|
|---|
| Research Institution | Tokai University (2014)
Keio University (2013) |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2013-04-01 – 2015-03-31
|
| Keywords | ナノ光計測 |
|---|
| Outline of Final Research Achievements |
We recognized the generation of nano-metric optical spot through the near-field to near-field coupling by using FDTD numerical simulations. According to the investigatoin of the dependence of optical spot generation on the probe shape and phsical properties, we found out the probe structure with high throughput.
We confirmed spatial measurement of 3.0 nm and measurement repeatabiliy of 1.0 nm by demonstration experiments. These resolution and repeatability are the best in the world. We also deveolped a scanning probe microscope for fast optical imaging. This instrument satisfies the target of imaging rate: 1.8 Hz.
Products: 3 peer-reviewed papers, 5 conference presentations(1 invited talk), and 1 prize.
|
| Free Research Field |
光計測
|
