Statistical process control for semiconductor process

2016 Fiscal Year Final Research Report

• Project/Area Number: 25750120
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Social systems engineering/Safety system
• Research Institution: Nagoya Institute of Technology (2015-2016); University of Tsukuba (2013-2014)
• Principal Investigator: Kawamura Hironobu 名古屋工業大学, 工学(系)研究科(研究院), 准教授 (50548261)
• Project Period (FY): 2013-04-01 – 2017-03-31
• Keywords: 統計的工程管理 / 実験計画法 / 品質管理 / 半導体製造

Outline of Final Research Achievements

Traditional control charts are designed for processes where large historical data sets are available before a production run for estimating process parameters and computing control limits. Many processes, particularly in semiconductor manufacturing, often involve limited data sets, which result from high-mix low-volume production. Therefore, we proposed a control chart based on bayesian statistics, an application of multivariate control charts, and a selection guide for two-level supersaturated designs.

Free Research Field

統計的品質管理