Study of plasma properties of EUV material ablation by particle diagnostics

2015 Fiscal Year Final Research Report

• Project/Area Number: 25800303
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Plasma science
• Research Institution: Osaka University
• Principal Investigator: Tanaka Nozomi 大阪大学, レーザーエネルギー学研究センタ, 特任研究員(常勤) (60581296)
• Research Collaborator: NISHIMURA Hiroaki 大阪大学, レーザーエネルギー学研究センター, 教授 (60135754) ; MURAKAMI Masakatsu 大阪大学, レーザーエネルギー学研究センター, 教授 (80192772) ; SUNAHARA Atsushi 公益財団法人レーザー技術総合研究所 (00370213) ; MASUDA Masaya 大阪大学, 工学研究科・レーザーエネルギー学研究センター, 修士課程学生 ; NAGATOMI Kensuke 近畿大学, 理工学部, 学部学生 ; DEGUCHI Ryo 大阪大学, 工学研究科・レーザーエネルギー学研究センター, 修士課程学生 ; WADA Nao 大阪大学, 工学研究科・レーザーエネルギー学研究センター, 修士課程学生
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 極端紫外(EUV)光 / 物質アブレーション / プラズマ膨張 / 粒子計測 / 物質加熱

Outline of Final Research Achievements

Recently application study of extreme ultraviolet (EUV) light has attracted much attention. The interaction of EUV light and matter principally differs from that of conventional lasers with longer wavelength. Application use of EUV ablation of materials, such for nano-machining or analytical methods, could be one of the technological innovation. However, the underlying physics and noticeable difference from laser ablation had not been much studied yet.
This study clarified noticeable difference in ablation process, such as formation of high-density and low-temperature plasma, formation of low-charged expanding ions, and one dimensional plasma expansion by measurements of expanding plasma particles and calculation of plasma parameters.

Free Research Field

プラズマ理工学