Low-voltage electrostatic micro three-dimantional scanner for endoscope

2015 Fiscal Year Final Research Report

• Project/Area Number: 25820132
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment
• Research Institution: Tohoku University
• Principal Investigator: SASAKI Takashi 東北大学, 工学(系)研究科(研究院), 助教 (60633394)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: MEMS / 焦点可変ミラー / スキャナ

Outline of Final Research Achievements

We have developed a fabrication process of low-voltage micro three-dimensional scanner for endoscope, and low-voltage actuation technology for varifocal mirror, and image construction system. We have studied a resonant varifocal mirror. We successfully obtained 150-times displacement amplification of varifocal mirror. Furthermore, by using the silicon-on-insulator wafer bonding technology, we successfully developed and conformed the actuation of the device with lateral and axial laser scanning function. The important technology was developed for obtaining the high precision living body measurement system.

Free Research Field

MEMS