その場TEM測定による10nm世代Siトランジスタの移動度に及ぼす歪み効果の解明

2013 Fiscal Year Research-status Report

• Project/Area Number: 25820336
• Research Category: Grant-in-Aid for Young Scientists (B)
• Research Institution: National Institute for Materials Science
• Principal Investigator: 湯 代明 独立行政法人物質・材料研究機構, その他部局等, 研究員 (50646271)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: in situ microscopy / silicon nanowires / strain engineering

Research Abstract

Single crystalline Si nanowires with desired n-type or p-type were prepared. The nanowires are about 10-100 nm in diameter and about 10 μm in length, with thin oxide layers (~2 nm thick). The Si NWs were manipulated by a STM-TEM holder to test the electrical properties and the dependence on the applied mechanical loading. Preliminary results demonstrated huge enhancements of conductivity related to the strain. For example, the conductivity increased along with the tensile stress in a nonlinear relation due to a tensile strain ~ 3.0 %. And reversible change of conductivity as much as 4 folds is presented by a bending strain ~ 12 %.

Current Status of Research Progress

1: Research has progressed more than it was originally planned.

Reason

I have successfully measured the strain effects on the conductivity of Si NWs by in situ TEM approach.

Strategy for Future Research Activity

Improvements of contact by in situ welding of low-melting point metals.
Fabrication of field effect transistors by twin-probe STM-TEM holder
Strain effects on electrical properties.
Understanding by theoretical calculations and modeling.

Expenditure Plans for the Next FY Research Funding

I was planning to go for conference in 2013, but I was too busy doing experiments and publications.
I plan to attend conference in 2014.

Research Products

• [Journal Article] Nanomechanical cleavage of molybdenum disulphide atomic layers (2014)
  • Author(s): Tang, D.-M.; Kvashnin, D. G.; Najmaei, S.; Bando, Y.; Kimoto, K.; Koskinen, P.; Ajayan, P. M.; Yakobson, B. I.; Sorokin, P. B.; Lou, J.; Golberg D.
  • Journal Title: Nature Communications Volume: 5 Pages: 3631
  • DOI: 10.1038/ncomms4631
  • Peer Reviewed
• [Journal Article] Structural Changes in Iron Oxide and Gold Catalysts during Nucleation of Carbon Nanotubes Studied by In Situ Transmission Electron Microscopy (2013)
  • Author(s): Tang, D.-M.; Liu, C.; Yu, W.-J.; Zhang, L.-L.; Hou, P.-X.; Li, J.-C.; Li, F.; Bando, Y.; Golberg, D.; Cheng, H.-M.
  • Journal Title: ACS Nano Volume: 8 Pages: 292-301
  • DOI: 10.1021/nn403927y
  • Peer Reviewed