2015 Fiscal Year Annual Research Report
その場TEM測定による10nm世代Siトランジスタの移動度に及ぼす歪み効果の解明
| Project/Area Number |
25820336
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
湯 代明 国立研究開発法人物質・材料研究機構, 国際ナノアーキテクトニクス研究拠点, 研究員 (50646271)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | silicon nanowire / transistors / strain engineering / carbon nanotubes / vacuum triodes |
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| Outline of Annual Research Achievements |
In the fiscal year 2015, I explored the electro-mechanical properties of one dimensional nanostructures ranging from 10 nm to 1 nm level. The achievements have been summarized as follows: 10 nm scale silicon p-type transistors have been successfully fabricated inside TEM. By fitting the I-V curves at different strains, it was revealed that the mobility of the silicon nanowires could be enhanced 3.8 folds from 2.90 to 11.11 cm2/Vs under tension and 2.7 times from 11.89 to 31.80 cm2/Vs under bending. In addition, transistors down to 1 nm level have been successfully fabricated by using the single walled carbon nanotubes as conductive channels. Both metallic and semiconducting behaviors have been demonstrated for these nanotubes. For the semiconducting ones, they are found to be ambipolar transistors. Furthermore, vacuum triodes based on these nanotubes have been made, showing effective switching of the field emission current by using a gate electrode.
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Research Products
(13 results)
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[Journal Article] Template-free synthesis of boron nitride foam-like porous monoliths and their high-end applications in water purification2016
Author(s)
Yanming Xue, Pengcheng Dai, Xiangfen Jiang, Xuebin Wang, Chao Zhang, Daiming Tang, Qunhong Weng, Xi Wang, Amir Pakdel, Chengchun Tang, Yoshio Bando, Dmitri Golberg
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Journal Title
Journal of Materials Chemistry A
Volume: 4
Pages: 1469-1478
DOI
Peer Reviewed / Int'l Joint Research
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[Journal Article] Amorphization and Directional Crystallization of Metals Confined in Carbon Nanotubes Investigated by in Situ Transmission Electron Microscopy2015
Author(s)
Dai-Ming Tang, Cui-Lan Ren, Ruitao Lv, Wan-Jing Yu, Peng-Xiang Hou, Ming-Sheng Wang, Xianlong Wei, Zhi Xu, Naoyuki Kawamoto, Yoshio Bando, Masanori Mitome, Chang Liu, Hui-Ming Cheng, Dmitri Golberg
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Journal Title
Nano Letters
Volume: 15
Pages: 4922-4927
DOI
Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
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