Fabrication of Diamond-Like Carbon Molecular Sieve Membrane via Plasma-Enhanced CVD

2014 Fiscal Year Final Research Report

• Project/Area Number: 25820382
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Properties in chemical engineering process/Transfer operation/Unit operation
• Research Institution: Hiroshima University
• Principal Investigator: NAGASAWA Hiroki 広島大学, 工学(系)研究科(研究院), 特任助教 (30633937)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: プラズマ化学気相蒸着法 / ダイヤモンドライクカーボン / 分子ふるい膜

Outline of Final Research Achievements

Diamond-like carbon-based molecular sieve membranes were successfully synthesized on porous TiO2 and SiO2-ZrO2 substrates via a plasma-enhanced chemical vapor deposition (PECVD) at room temperature. The membranes exhibited high permeselectivity for H2/N2 (28.8), H2/CF4 (619), and H2/SF6 (1030) with an excellent thermal stability. The results showed that PECVD is promising for the preparation of DLC molecular sieve membranes for gas separation.

Free Research Field

膜工学