2015 Fiscal Year Final Research Report
optical profile measurement system with the high horizontal resolution by the collecting laser irradiation
| Project/Area Number |
25870216
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
Measurement engineering
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| Research Institution | Meiji University (2015)
Tokyo Institute of Technology (2013-2014) |
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Principal Investigator |
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Keywords | 形状計測 / 光プローブ / 水平分解能 / 集中照射 / 非点収差法 / 光線追跡法 |
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| Outline of Final Research Achievements |
In this study, in order to realize the profile measurement by the optical probe with a high horizontal resolution, an optical profile measurement system by the collecting laser irradiation. Results of the optical simulation showed that the proposed optical probe had higher horizontal resolution compared with the conventional optical probe. In addition, experimental results confirmed that the profile calculation method determined from the simulation results can measure the specimen shape. From these results, it was shown that the proposed optical probe by the collecting laser irradiation is effective as a method of improving the horizontal resolution of optical probe.
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| Free Research Field |
精密加工計測
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