2015 Fiscal Year Final Research Report
Photon-stimulated desorption surface spectroscopy by extreme ultraviolet emissions from a laser-produced plasma
| Project/Area Number |
25870565
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Electron device/Electronic equipment
Optical engineering, Photon science
|
|---|
| Research Institution | University of Miyazaki |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2013-04-01 – 2016-03-31
|
| Keywords | 光プロセッシング / 微細プロセス / 光脱離 / 表面分析 |
|---|
| Outline of Final Research Achievements |
We have demonstrated the photon-stimulated surface spectroscopy using broadband vacuum ultraviolet (VUV) emissions from a laser-produced plasma, in which adsorbed atoms or molecules on material surfaces were to be desorbed and dissociated as a result of absorption of the wavelength-selected VUV photons. Desorbed and dissociated atoms or molecules were then detected by a mass spectrometer. Mass spectra of polyethylene and polyvinyl chloride samples were obtained as a function of the irradiation wavelength. We have found sufficient characteristic differences of the mass spectra in the irradiation wavelength shorter than 200 nm in each sample. The desorption and dissociation of atoms or molecules from material surfaces depended on bond energy or molecular structure.
|
| Free Research Field |
レーザー工学
|
